Development of etch gas for Co interconnect dry etching and dry etching process of Co thin films at Inha UniversityDevelopment of etch gas for Co interconnect dry etching and dry etching process of Co thin films at Inha University
Director of the Domain “New Mobility Solutions and Shared Energies” at VEDECOMDirector of the Domain “New Mobility Solutions and Shared Energies” at VEDECOM