YATISH PRASAD

Mask layout and Tapeout

• Build, Validate and handle New Design Libraries and Final archives, Accountable for Final EDA checks (LVS, DRC,LVL).
• Generate Final Data and manage post-processing tapeout flows and Validate final mask data.
• Lead Tapeout order paperwork and Coordinate with Partner Teams to ensure alignment of needs, expectations, priorities and resources to hit schedules

• Perform various R&D tasks, such as design process flow, process integration, run experiments
• To develop MEMS fabrication unit-level processes and process flow for various devices like piezoresistive and Capacitive based MEMS
• Responsible for Process Flow development of High-G MEMS Switch, Low-G accelerometers and MEMS-based Thz Detector
• Work closely with designer, process module owner to develop new process technologies and Devices
• Conduct integration lots, R&D lots, Unit level process optimization lots, manage the lot progress and execute inspection stage.
• Process trouble shooting through inspection & characterization of MEMS devices or Structures and failure analysis using metrology tools like SEM, ellipsometer ,optical profiler, Optical and 3D microscope.
• Electrical characterization of devices using probe station and laser doppler vibrometer.
• Working with design, module processes, assembly, packaging and testing to ensure successful realization of MEMS device.
• Project management, report and documentation.

• Recipe development, qualification, and optimization of photo-lithography process for various MEMS devices
• Work with designer and tape-out engineers for DRC, tape-out and Photomask fabrication
• Responsible for process stability of equipment & documentation for assigned photolithography process module
• Experience in operation and basic maintenance of various Photo-lithography tools like EVG 6200NT Mask Aligner, SUSS MA6/BA6 Mask aligner, OAI 8006M Mask Aligner, SUSS Gamma wafer track system, EVG 40 Front to Back Alignment verification tool, PvaTepla GIGABATCH Asher, NanoMaster LSC4000 Mask & Wafer cleaner, Olympus Optical Microscope, Laurell Tabletop Coater and Developer
• Conduct periodically qualification of tools, data analysis of wafer-level measurement to maintain a control process
• Development of Photo-resists Lift off process using Z5214E Image reversal photoresist for development of Platinum-based temperature sensor (RTD 1000).
• Development of temporary wafer bonding and de-bonding process using photo-resist, Wax and Temporary bonding.
• Development of Lift-off process using Bilayer Photoresist
  method using AZ 10XT 420cP Photoresist.
• Development of 3D diffuser Photolithography process.
• Worked as a team member in various MEMS device team
  like capacitive accelerometer , pressure sensor, temperature sensor and RF MEMS.